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Swellable Film Forming Composition and Method of Nanoimprint Lithography Using It

机译:溶胀性成膜组合物及其纳米压印光刻方法

摘要

Which can be cast and cured on a substrate to form a micro-replicated pattern, and further, swell upon exposure to water to release from the substrate. A water swellable acrylic polymer formed from such compositions, and methods of using it in nanoimprint lithography, are also disclosed.
机译:可以将其浇铸和固化在基材上以形成微复制图案,然后在暴露于水时溶胀以从基材上释放。还公开了由这种组合物形成的水溶胀性丙烯酸聚合物,以及在纳米压印光刻中使用它的方法。

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