The charge part chen beam apparatus comprising: an electron gun for generating an electron beam; an image as a lens system for mapping the electron beam, which are passed through a sample; a dividing labs chnitt (6), where the environment through the image system electron beam lenses which are passed into a first image component and a second image component is divided; a first image acquisition unit (7) for detecting the first image component and outputting a first image (32); a second image acquisition unit (9) for detecting the second image component and outputting a second image (33); a processing unit; and display units (14, 15). The magnification for the second image (33) is greater than the magnification for the first image (32). The processing unit generates a third image (36), in that the first image (32) and the second image (33) are combined, and the display units (14, 15) show the second image (33) and the third image (36) on.
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