Samples displacement of the method in charge part chen jet apparatus and charge part chen beam apparatus as well as sample for transmission electron microscope

摘要

In a chamber of a charge part chen beam device on the sample substrate that the sample is gripped and transported to the sample holder and the position of the sample is controlled, if the sample is fastened on the sample holder. There is controlled to a marking process, which in the chamber by a beam of a marking on a surface of the sample wb, which is present on the sample substrate, applying a transport process, said sample by a samples gripper grasps and finely the direction from the sample substrate that is transported to the specimen holder; and a position controller before gear, which controls the position of the sample, when the sample is fastened on the sample holder, while the air on the surface of the sample is observed marking applied.