Micromechanical component for a bearingless electric motor, a bearing-free electric motor and a method for manufacturing of the micromechanical component and of the bearingless electric motor

摘要

The present invention relates to a micromechanical component (12) for a bearingless electric motor (10) with a semiconductor - support structure (14) consists of at least one semiconductor material, in which at least one receiving opening (16) is structured in such a manner that a a permanent magnet (18), a rotor (18) and centered about an axis of rotation (20) rotatably mounted in the at least one receiving opening (16) can be arranged and flow conductor pieces (22) radially around the rotor (18) in the at least one receiving opening (16) can be arranged, and at least one sensor device (30), which on and / or in the semiconductor - support structure (14) is designed. The invention also relates to a bearingless electric motor (10). Furthermore, the invention relates to a method for producing a micromechanical component (12) for a bearingless electric motor (10) and a process for producing a bearingless electric motor (10).n="24"