Micromechanical component and method for producing a piezoelectric micromechanical component

摘要

The invention relates to a micromechanical component having a layer structure comprising at least one substrate (10), a first conductive layer (11) of a piezoelectrically active layer (12) and a second conductive layer (13), the first and second conductive layers (11, 13 ) Electrodes for the piezoelectrically active layer (12) form proposed. The substrate (10) is at the same time a mechanical functional layer as a support for the piezoelectrically active layer and is designed to deform simultaneously with the piezoelectrically active layer (12).