Semiconductor wafer mass metrology apparatus and semiconductor wafer mass metrology method

摘要

A semiconductor wafer mass metrology apparatus comprising:a measurement chamber for measuring the weight and/or the mass of a semiconductor wafer;a first temperature changing part for changing a temperature of the semiconductor wafer before the semiconductor wafer is transported into the measurement chamber; and a first temperature sensor for sensing a first temperature, wherein the first temperature is:a temperature of the first temperature changing part; or a temperature of the semiconductor wafer when the semiconductor wafer is on the first temperature changing part,or when the semiconductor wafer leaves the first temperature changing part.