QUANTITATIVE ANALYSIS DEVICE FOR TRACE CARBON AND QUANTITATIVE ANALYSIS METHOD FOR TRACE CARBON

摘要

The present invention makes it possible to analyze trace carbon in a sample without the effects of contamination. In an electron probe microanalyzer, a liquid nitrogen trap (6) and a plasma or oxygen radical generator are jointly used as a means for suppressing contamination, and two or more carbon detection units (9, 10) for detecting characteristic x-rays (8) of carbon in the sample (7) are provided.