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Quantitative analysis device for trace carbon and quantitative analysis method for trace carbon
Quantitative analysis device for trace carbon and quantitative analysis method for trace carbon
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机译:痕量碳定量分析装置及痕量碳定量分析方法
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摘要
The present invention makes it possible to analyze trace carbon in a sample without the effects of contamination. In an electron probe microanalyzer, a liquid nitrogen trap and a plasma or oxygen radical generator are jointly used as a means for suppressing contamination, and two or more carbon detection units for detecting characteristic x-rays of carbon in the sample are provided.
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