QUANTITATIVE ANALYSIS DEVICE FOR TRACE CARBON AND QUANTITATIVE ANALYSIS METHOD FOR TRACE CARBON

摘要

Thereby enabling analysis of trace carbon in the sample without influence of confinement. In the electron beam microanalyzer, as the control means of the confinement, carbon nanotubes (carbon nanotubes) for detecting the characteristic X-ray 8 of carbon in the sample 7 are used together with the liquid nitrogen trap 6 and the plasma or oxygen radical generator, Two or more detecting portions 9 and 10 are formed.