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SEMICONDUCTOR DEVICE INCLUDING RESONANT TUNNELING DIODE STRUCTURE HAVING A SUPERLATTICE AND RELATED METHODS

机译:具有超晶格谐振隧道二极管结构的半导体器件及相关方法

摘要

A semiconductor device may include at least one double-barrier resonant tunneling diode (DBRTD). The at least one DBRTD may include a first doped semiconductor layer and a first barrier layer on the first doped semiconductor layer and including a superlattice. The superlattice may include stacked groups of layers, each group of layers including a plurality of stacked base semiconductor monolayers defining a base semiconductor portion, and at least one non-semiconductor monolayer constrained within a crystal lattice of adjacent base semiconductor portions. The at least one DBRTD may further include an intrinsic semiconductor layer on the first barrier layer, a second barrier layer on the intrinsic semiconductor layer, and a second doped semiconductor layer on the second superlattice layer.
机译:半导体器件可以包括至少一个双势垒谐振隧穿二极管(DBRTD)。至少一个DBRTD可以包括第一掺杂半导体层和在第一掺杂半导体层上并且包括超晶格的第一势垒层。超晶格可包括堆叠的层组,每组层包括限定基础半导体部分的多个堆叠的基础半导体单层,以及约束在相邻基础半导体部分的晶格内的至少一个非半导体单层。至少一个DBRTD可以进一步包括在第一阻挡层上的本征半导体层,在本征半导体层上的第二阻挡层以及在第二超晶格层上的第二掺杂半导体层。

著录项

  • 公开/公告号EP3494599A1

    专利类型

  • 公开/公告日2019-06-12

    原文格式PDF

  • 申请/专利权人 ATOMERA INCORPORATED;

    申请/专利号EP17754916.9

  • 申请日2017-08-08

  • 分类号H01L29/88;H01L21/329;H01L29/15;

  • 国家 EP

  • 入库时间 2022-08-21 12:29:34

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