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Electromechanical device with acoustic waves comprising a transduction area and an area of free propagation being a resonant structure
Electromechanical device with acoustic waves comprising a transduction area and an area of free propagation being a resonant structure
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机译:具有声波的机电装置,其包括换能区域和自由传播区域是共振结构
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摘要
The device has a planar piezoelectric material structure (Mpiezo) comprising a free propagation zone (ZP) of acoustic waves generated at a transduction zone (ZT). Total length of the structure is equal to an integer of half of a wavelength that complies with equation comprising resonance frequency of resonator and average wave propagation speed to adjust a quality coefficient of resonator determined by the length and a coupling coefficient determined by a ratio of transduction length to the total length. The structure is delimited laterally by reflection zones and resonant cavities (F1, F2).
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