METHOD AND SYSTEM OF ULTRAFAST LASER WRITING OF HIGHLY-REGULAR PERIODIC STRUCTURES

摘要

A method, a product by the method and device of preparation of highly-regular periodic structure using a pulsed laser beam irradiating a spot on a surface of a substrate are disclosed. The method of direct formation of highly-regular periodic structure on a materials uses activation of Surface Electromagnetic Wave (SEW) interfering with the laser beam on the surface of the substrate in a manner which ensures high quality and regularity of the obtained pattern.