PHOTODIODE AND OTHER SENSOR STRUCTURES IN FLAT-PANEL X-RAY IMAGERS AND METHOD FOR IMPROVING TOPOLOGICAL UNIFORMITY OF THE PHOTODIODE AND OTHER SENSOR STRUCTURES IN FLAT-PANEL X-RAY IMAGERS BASED ON THIN-FILM ELECTRONICS

摘要

The invention concerns a radiation sensor comprising:a photoconductor detector including in order a first electrode, a photoconductive layer, and an ionizing radiation transmissive second electrode, and said photoconductive layer configured to generate electron-hole pairs upon interaction with ionizing radiation;pixel circuitry electrically connected to the first electrode and configured to measure an imaging signal indicative of said electron-hole pairs generated in the photoconductive layer;a planarization layer disposed on the pixel circuitry between the first electrode and the pixel circuitry such that the first electrode is above a plane including the pixel circuitry;a surface of at least one of said first electrode and said second electrode at least partially overlapping the pixel circuitry and having a planar portion and a surface inflection above features of the pixel circuitry; andsaid surface inflection extending from said planar portion and having, from said planar portion, a radius of curvature greater than one half micron.