LOCAL HEATING DEVICE OF SUBSTRATE, CONTROL DEVICE OF EDGE FILM THICKNESS OF FLUID OF SUBSTRATE TO WHICH FLUID IS APPLIED, COATING DEVICE OF FLUID, DRYING DEVICE OF FLUID APPLIED ON SUBSTRATE, AND CONTROL METHOD OF EDGE THICKNESS OF FLUID

摘要

To reduce the thickening of the end of a fluid applied to a substrate and improve the productivity.SOLUTION: In a fluid-applied substrate, the end portion of a fluid of the fluid-applied substrate is heated to a predetermined temperature by means of heating to a temperature higher than the surrounding.SELECTED DRAWING: Figure 1