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電鋳用母型及びその製造方法

机译:电铸母模及其制造方法

摘要

PROBLEM TO BE SOLVED: To provide a master block for electrocasting which is prevented from variation with time which appears as displacement of a mask body formed on the master block by electrocasting, to allow a mask to be improved in accuracy by suppressing variation in volume such as contraction of an adhesive layer in the master block having a laminated structure to avoid an influence of the variation upon each part of the master block.;SOLUTION: An entire structure of an adhesive layer 12 is stabilized by achieving a state where variation in volume with time hardly occurs in center portions 12d and 12f except a frame-like portion in a prescribed range from an outer peripheral edge in the adhesive layer 12, so that a base part 11 and a conductor layer 13 can be stably and fixedly integrated by the adhesive layer 12 showing less variation with time, displacement of the conductive layer 13 caused by variation in volume of the adhesive layer 12 and displacement of a primary electrodeposition layer formed on the conductive layer 13 can be suppressed, and the reduction in accuracy of a mask formed by using a master block 10 can be prevented.;SELECTED DRAWING: Figure 1;COPYRIGHT: (C)2019,JPO&INPIT
机译:解决的问题:提供一种用于电铸的母模,其可以防止随时间变化,该随时间变化是通过电铸形成在母模上的掩模主体的位移而出现的,从而通过抑制体积变化来提高掩模的精度。作为具有层压结构的母模中粘合剂层的收缩,以避免变化对母模各部分的影响。;解决方案:通过实现体积变化的状态来稳定粘合剂层12的整个结构。随着时间的流逝,除了在从粘合剂层12的外周边缘起的规定范围内的框状部分之外,在中心部分12d和12f中几乎不发生任何情况,因此,基部11和导体层13可以通过该连接器稳定且固定地集成。粘合剂层12显示出随时间变化较小,由粘合剂层12的体积变化引起的导电层13的位移和一次电极的位移可以抑制在导电层13上形成的氧化皮层,并且可以防止通过使用母模10形成的掩模的精度降低。;选择的图纸:图1;版权:(C)2019,JPO&INPIT

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