PRODUCTION DEVICE OF SUBSTRATE WITH TRANSPARENT CONDUCTIVE FILM, PRODUCTION METHOD OF SUBSTRATE WITH TRANSPARENT CONDUCTIVE FILM, SUBSTRATE WITH TRANSPARENT CONDUCTIVE FILM AND SOAR BATTERY

摘要

To provide a production device of a substrate with a transparent conductive film, in which transparent conductive films of different content amounts of hydrogen are arranged in a front side and a back side of the substrate.SOLUTION: In the production device 700 of the substrate with the transparent conductive film of the invention, in film deposition chambers SP1 to SP4, a gas derivation part of a first process gas introduction mechanism G21 and G22 for supplying first process gas including hydrogen is installed in a vicinity of first targets TG21 and TG22 for forming the first transparent conductive film in the front side of the substrate 101, at a position where the first process gas is blown to one target located in an upper side out of the first targets in a move direction of the substrate. In the back side of the substrate, in the vicinity of second targets TG41 and TG42 for forming the second transparent conductive film, a gas introduction part of a second process gas introduction mechanism G41 and G42 for supplying second process gas which does not include hydrogen is installed.SELECTED DRAWING: Figure 1