EELS DETECTION TECHNIQUE IN ELECTRON MICROSCOPE

摘要

To provide an EELS detection technique in an electron microscope.SOLUTION: A method for executing an electron energy-loss spectroscopy EELS in an electron microscope includes supply of a sample to a sample holder, generation of electron beams from a source, use of a luminaire for orienting beams so as to be applied to a sample, and use of an imaging system for receiving electron flux through a sample and orienting it onto a spectroscope. The spectroscope includes: a dispersion device for dispersing electron flux in a dispersion direction so as to form an EELS spectrum; and a detection surface subdivided into a plurality of detection zones.SELECTED DRAWING: Figure 4