EELS DETECTION TECHNIQUE IN AN ELECTRON MICROSCOPE

摘要

A method of performing Electron Energy-Loss Spectroscopy (EELS) in an electron microscope, comprising:Producing a beam of electrons from a source;Using an illuminator to direct said beam so as to irradiate the specimen;Using an imaging system to receive a flux of electrons transmitted through the specimen and direct it onto a spectroscopic apparatus comprising: A dispersion device, for dispersing said flux in a dispersion direction so as to form an EELS spectrum; andA detector, comprising a detection surface that is sub-divided into a plurality of detection zones,;specifically comprising:Using at least a first detection zone, a second detection zone and a third detection zone to register a plurality of EELS spectral entities; andReading out said first and said second detection zones whilst said third detection zone is registering one of said plurality of EELS spectral entities.