FREE AIR BALL FORMING METHOD, WIRE BONDING METHOD, AND WIRE BONDING APPARATUS

摘要

To provide a method for forming a free air ball which stably forms a FAB having a normal shape.SOLUTION: In a method for forming a free air ball, a free air ball for wire bonding of a wire tip is formed on the wire tip by electric discharge generated between the wire tip and a torch. In the method of forming a free air ball, the current state of discharge generated between the tip of a wire placed at a predetermined position with respect to the torch and the torch is detected, and parameters related to the occurrence of discharge are adjusted on the basis of the current state of discharge and the normal state of discharge stored in advance.SELECTED DRAWING: Figure 6