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インプリントモールド

机译:压印模具

摘要

To provide an imprint mold having a through-hole which is less likely to leave a cleaning solution, a foreign matter, and the like at the time of cleaning and spin drying in a manufacturing process.SOLUTION: An imprint mold includes a substrate having a first surface and a second surface opposite to the first surface, a concavo-convex structure formed in a pattern area set on the first surface side of the substrate, and a through hole penetrating between the first surface and the second surface of the substrate outside the pattern area. When a cross section in a thickness direction of the substrate is viewed, a first portion located at the most distal side from the pattern area in the outer edge of a first opening of the through hole located on the first surface side is located on the pattern area side as compared to a second portion located farthest from the pattern area in the outer edge of a second opening of the through hole located on the second surface side.SELECTED DRAWING: Figure 1
机译:提供一种具有通孔的压印模具,该压印模具在制造过程中的清洁和旋转干燥时不太可能留下清洁溶液,异物等。第一表面和与第一表面相对的第二表面,在设置在基板的第一表面侧上的图案区域中形成的凹凸结构,以及在基板的外部在基板的第一表面和第二表面之间穿透的通孔。图案区域。当观察基板的厚度方向上的截面时,位于位于第一表面侧上的通孔的第一开口的外边缘中的距离图案区域最远侧的第一部分位于图案上。与位于第二表面侧的通孔第二开口的外边缘中距离图案区域最远的第二部分相比,该区域更小。

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