Fine processing device, fine working unit, control device, manufacturing method of master plate, and fine processing method for base material for master board

摘要

To provide a novel and improved microfabrication apparatus and the like capable of enhancing processing accuracy when cutting a base material for an original board using a plurality of tools.SOLUTION: In order to solve the above problem, according to one aspect of the present invention, there is provided a microfabrication apparatus comprising: a tool installation unit; a first tool fixed to the tool installation unit and capable of forming a fine recessed part on a base material for an original board; a second tool provided in the tool installation unit and capable of forming a fine recessed part on the base material for the original board; a tool adjustment unit capable of adjusting an installation position of the second tool; a displacement measurement unit for measuring a displacement of the second tool; a base drive unit for relatively moving the tool installation unit with respect to the base material for the original board; and a control unit for calculating a relative distance from a point of application of the first tool to a point of application of the second tool based on the displacement of the second tool and controlling the tool adjustment unit to maintain the relative distance at a value within a predetermined range.SELECTED DRAWING: Figure 1