PRODUCTION METHOD OF Mn-BASED FERROMAGNETIC THIN FILM, AND Mn-BASED FERROMAGNETIC THIN FILM

摘要

PROBLEM TO BE SOLVED: To provide a production method of an Mn-based ferromagnetic thin film having an axis of easy vertical magnetization and highly magnetic anisotropy, having small surface roughness, and usable for an element of MTJ or the like; and to provide the Mn-based ferromagnetic thin film.;SOLUTION: After depositing by sputtering, a thin film comprising an alloy containing 50-60 at% of Mn and 40-50 at% of Al, and having an axis of easy magnetization oriented vertically to the surface of the film, by using a target manufactured by a dissolution method, on a substrate at 200°C-375°C, a heat treatment is performed thereto within 100 minutes at a temperature of 300°C or higher and 375°C or lower.;SELECTED DRAWING: Figure 1;COPYRIGHT: (C)2019,JPO&INPIT