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Method of providing a perpendicular magnetic anisotropic magnetic junction usable in spin transfer torque magnetic devices using a sacrificial insertion layer
Method of providing a perpendicular magnetic anisotropic magnetic junction usable in spin transfer torque magnetic devices using a sacrificial insertion layer
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机译:提供一种使用牺牲插入层的可用于自旋转移矩磁性器件的垂直磁性各向异性磁结的方法
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摘要
The invention provides a method for providing a magnetic junction which can be used in a magnetic device, and the magnetic junction thereof. The method comprises providing a free layer, a pinned layer and a non-magnetic interval layer between the free layer and the pinned layer. The free layer can be switched among a plurality of stable magnetic states when a writing current passes through the magnetic junction. At least one step for providing the free layer comprises a plurality of first steps, and the step for providing the pinned layer comprises a plurality of second steps. The first steps and the second steps comprise depositing one part of the layer, depositing a sacrificial layer, annealing the part of the magnetic junction below the sacrificial layer, and depositing the residual part of the layer. The layer can be the free layer, the pinned layer or both.
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