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Method of providing a perpendicular magnetic anisotropic magnetic junction usable in spin transfer torque magnetic devices using a sacrificial insertion layer

机译:提供一种使用牺牲插入层的可用于自旋转移矩磁性器件的垂直磁性各向异性磁结的方法

摘要

The invention provides a method for providing a magnetic junction which can be used in a magnetic device, and the magnetic junction thereof. The method comprises providing a free layer, a pinned layer and a non-magnetic interval layer between the free layer and the pinned layer. The free layer can be switched among a plurality of stable magnetic states when a writing current passes through the magnetic junction. At least one step for providing the free layer comprises a plurality of first steps, and the step for providing the pinned layer comprises a plurality of second steps. The first steps and the second steps comprise depositing one part of the layer, depositing a sacrificial layer, annealing the part of the magnetic junction below the sacrificial layer, and depositing the residual part of the layer. The layer can be the free layer, the pinned layer or both.
机译:本发明提供一种用于提供可在磁性装置中使用的磁性结的方法及其磁性结。该方法包括在自由层和被钉扎层之间提供自由层,被钉扎层和非磁性间隔层。当写入电流通过磁性结时,可以在多个稳定的磁性状态之间切换自由层。用于提供自由层的至少一个步骤包括多个第一步骤,并且用于提供被钉扎层的步骤包括多个第二步骤。第一步和第二步包括沉积层的一部分,沉积牺牲层,使牺牲层下方的磁性结的一部分退火以及沉积层的剩余部分。该层可以是自由层,固定层或两者。

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