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METHOD FOR PROVIDING PERPENDICULAR MAGNETIC ANISOTROPY MAGNETIC JUNCTION USABLE IN SPIN TRANSFER TORQUE MAGNETIC DEVICE USING SACRIFICIAL INSERTION LAYER
METHOD FOR PROVIDING PERPENDICULAR MAGNETIC ANISOTROPY MAGNETIC JUNCTION USABLE IN SPIN TRANSFER TORQUE MAGNETIC DEVICE USING SACRIFICIAL INSERTION LAYER
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机译:利用牺牲插入层提供可用于自旋转矩型磁性设备中的垂直磁各向异性磁结的方法
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摘要
PROBLEM TO BE SOLVED: To provide a method for providing a magnetic junction usable in a magnetic device.SOLUTION: A method for providing a magnetic junction usable in a magnetic device includes the steps of providing a free layer, a nonmagnetic spacer layer and a fixed layer, respectively. The free layer is switched between a plurality of stable magnetic states when a write current is passed through the magnetic junction. At least one step selected from the step of providing the free layer and the step of providing the fixed layer includes a plurality of steps. At least one step of providing the free layer includes first plural steps. At least one step of providing the fixed layer includes second plural steps. The first and second plural steps include the steps of vapor depositing a partial region of a layer, vapor depositing a sacrificial layer, vapor depositing a region of magnetic junction below the sacrificial layer, and vapor depositing a residual region of the layer, the layer including the free layer, the fixed layer or both of the layer.
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