METAL OXIDE THIN PIECE PRODUCTION DEVICE AND METAL OXIDE THIN PIECE PRODUCTION METHOD

摘要

To provide technology capable of continuously producing a thin metal oxide piece.SOLUTION: An oxide metal thin piece production device 1 comprises: an evaporation creation section 12 for creating MO gas which is oxide MO gas of metal M by heating a material; a cooling roller 13 having a surface cooled to 0°C or less, on which the MO film with crack by shrinkage is formed by evaporating the MO gas; a driving motor 133 for rotating the cooling roller 13 with a cylindrical center as an axis; a scraper 14 for peeling the MO film with crack by separating the cooling roller 13 with a specified gap; a gas purge section for degassing inside a storage tank 11 accommodating the evaporation creation section 12, the cooling roller 13, and the scraper 14, while purging inside the storage tank 11 with a gas not reacting with MO; and an oxidation section where the peeled MO film piece is exposed under oxygen atmosphere of a predetermined concentration in the storage tank 11.SELECTED DRAWING: Figure 1