Substituted cyclopentadienyl cobalt complex and method for producing the same, cobalt-containing thin film and method for producing the same

摘要

PROBLEM TO BE SOLVED: To provide a cobalt complex useful for making a cobalt-containing thin film under the condition of using no oxidative gas.SOLUTION: The present invention provides a cyclopentadienyl cobalt complex represented by formula (1) (Ris a trialkyl silyloxy group; Ris H, a C1-6 alkyl group or a trialkyl silyloxy group; R-Rare H or a C1-6 alkyl group).SELECTED DRAWING: None