PROBLEM TO BE SOLVED: To provide an advantageous technology by which an operator performs efficiently a process for searching a mark.;SOLUTION: A processor includes: a driving mechanism for driving an object having a mark; a scope for imaging the object; and a controller by which the object is driven in a driving direction relating to a driving instruction according to the driving instruction given to an operation terminal by an operator who searches for the mark while seeing a display of an operation terminal, after that, controls the driving mechanism such that drive of the object is stopped according to a stop instruction given to the operation terminal by the operator. The controller determines a returning amount in accordance with an amount by which the object moved until the object actually stops from when the operator tries to stop the object, after the drive of the object is stopped according to the stop instruction, the driving mechanism is controlled such that in accordance to the returning amount, the object is driven in a direction opposite to the driving direction.;SELECTED DRAWING: Figure 3;COPYRIGHT: (C)2019,JPO&INPIT
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