MULTI-LAYER THIN FILM LAMINATE FOR DIFFRACTIVE OPTICAL ELEMENT

摘要

PROBLEM TO BE SOLVED: To solve the problem that when a multi-step surface relief profile is selected, etch depth greater than a threshold may be required depend on a material used for DOEs, thereby it takes long etching time for manufacturing the DOEs.;SOLUTION: An optical element may include a first anti-reflectance structure for a particular wavelength range formed on a substrate. The optical element may include at least one layer disposed on a portion of the first anti-reflectance structure. The optical element may include a second anti-reflectance structure for the particular wavelength range formed on the at least one layer. A depth between a first surface of the first anti-reflectance structure and a second surface of the second anti-reflectance structure, a first index of refraction of the first anti-reflectance structure, a second index of refraction of the second anti-reflectance structure, and a third index of refraction of the at least one layer may be selected to form a diffractive optical element associated with a phase delay for the particular wavelength range.;SELECTED DRAWING: Figure 3A;COPYRIGHT: (C)2019,JPO&INPIT