独立して回転可能なウェストを有するロボットシステム、装置、および方法

摘要

PROBLEM TO BE SOLVED: To provide a robot apparatus performing an efficient and precise transport of substrates between process chambers or between process chambers and load lock chambers.;SOLUTION: Electronic device processing systems and robot apparatus 104 are adapted to efficiently pick or place substrates 105A, 105B from or into twin chambers by having independently rotatable first and second booms 118, 119, and independently rotatable first and second upper arms 128, 142. Each upper arm has respective forearms 132, 148, respective wrist members 136, 152, and respective end effectors adapted to carry a substrate coupled thereto. The boom members and upper arms are driven through co-axial drive shafts.;SELECTED DRAWING: Figure 1B;COPYRIGHT: (C)2019,JPO&INPIT