Direct drive motor, transfer device, inspection device, machine tool, and semiconductor manufacturing device

摘要

PROBLEM TO BE SOLVED: To provide a direct drive motor in which lowering of performance can be suppressed.SOLUTION: A direct drive motor includes a stator having a stator core provided with a plurality of teeth, a plurality of first phase coils and a plurality of second phase coils and a plurality of third phase coils, a rotor rotatable around the rotating shaft for the stator, a first lead wire connected with a power supply section via a connector, and supplying power to the first phase coils, a second lead wire for supplying power to the second phase coils, and a third lead wire for supplying power to the third phase coils. The first phase coils for connection with the first lead wire are arranged to face a connector. The second phase coils for connection with the second lead wire are arranged in one of the first phase coils facing the first lead wire in the rotational direction of the rotating shaft, and the third phase coils for connection with the third lead wire are arranged in the other of the first phase coils facing the first lead wire in the rotational direction of the rotating shaft.