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Electroplating bath for forming porous cage-like copper plating film and method for forming porous cage-like copper plating film using the same
Electroplating bath for forming porous cage-like copper plating film and method for forming porous cage-like copper plating film using the same
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机译:用于形成多孔笼状铜镀膜的电镀浴和使用其形成多孔笼状铜镀膜的方法
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摘要
PROBLEM TO BE SOLVED: To provide a technology capable of increasing specific surface area of a copper plating film.SOLUTION: An electrodeposition bath for forming a porous crock-shaped copper plating film contains (a) a tertiary amine having an aryl group which may have a substituent and (b) a tertiary amine having a long chain alkyl group which may have a substituent, in a copper pyrophosphate plating bath. A method for forming the porous crock-shaped copper plating film includes a step of electrodeposition using the same. The present invention also provides the porous crock-shaped copper plating film obtained by the method.SELECTED DRAWING: Figure 2
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