Film thickness signal processor, polishing apparatus, film thickness signal processing method, and polishing method

摘要

PROBLEM TO BE SOLVED: To improve the accuracy of film thickness detection.SOLUTION: A film thickness signal processor 230 includes a receiving section 232 that receives film thickness data outputted from an eddy-current sensor 210 that detects a film thickness of a target object 102 for polishing along a polishing surface, an identification section 236 that identifies an effective range of the film thickness data on the basis of the film thickness data received by the receiving section 232, and a correction section 238 that corrects film thickness data within the effective range identified by the identification section 236.SELECTED DRAWING: Figure 1