Work drying judgment method after steam cleaning and steam cleaning vacuum drying apparatus

摘要

An object of the present invention is to provide a workpiece drying determination method capable of detecting a drying defect of a workpiece after steam cleaning, thereby enhancing the productivity of the steam cleaning vacuum drying apparatus. A workpiece is accommodated in a vacuum-tight vacuum chamber and a cleaning solution vapor is introduced to vapor-clean the workpiece. After the steam cleaning step, the pressure in the vacuum chamber is reduced to remain on the surface of the workpiece. It is a method of judging the quality of drying of a work in a vacuum drying process of drying a work by bumping a cleaning liquid, wherein the pressure in the vacuum tank reaches a predetermined target pressure in the vacuum drying process (S2) The temperature in the vacuum chamber when the target pressure is reached is equal to or higher than the predetermined target temperature (S5), and the vacuum chamber is in the vacuum chamber from the start of the vacuum drying process until the predetermined time passes. It is determined that the drying of the work is good (S9), when the temperature drop of the temperature is within the predetermined range (S8). [Selected figure] Figure 2