Resist solution storage container, resist solution supply device, resist solution coating device, resist solution storage device, and mask blank manufacturing method

摘要

This resist liquid storage container has: a flexible bag section having a storage section for storing a resist liquid therein; an injection tube for injecting the resist liquid, said injection tube being in communication with the storage section; and a discharge tube for discharging the resist liquid to the outside of the resist liquid storage container, said discharge tube being in communication with the storage section.