Inspection method, the production method of defect correcting method and template nanoimprint lithography

摘要

PROBLEM TO BE SOLVED: To provide an inspection method, a defect correction method and a production method of a template for NIL (nanoimprint lithography) by which a minute black defect and white defect can be detected.SOLUTION: The inspection method aims to inspect a template for nanoimprint lithography having a concavo-convex pattern formed on a surface thereof, and the method includes: a first template preparation step; an inspection template production step of producing a transfer-target template that is finally obtained as an inspection template by using the above first template as a master template and subjecting the first template to at least one imprint transfer step; and an inspection template inspection step. In the inspection template production step, a defect enhancing step is carried out at least once; and the defect enhancing step is configured to decrease or increase a width of a convex portion in a concavo-convex pattern of the transfer-target template than a width of the corresponding concave portion in a concavo-convex pattern of the transfer-origin template.SELECTED DRAWING: Figure 1