The luminous epitaxial substrate and manufacturing method of electron-beam excitation and the luminescent device of electron-beam excitation

摘要

PROBLEM TO BE SOLVED: To provide an electron beam excited light emitting epitaxial substrate capable of improving light emission output, a method for manufacturing the electron beam excited light emitting epitaxial substrate, and an electron beam excited light emitting device.SOLUTION: An electron beam excited light emitting epitaxial substrate radiating ultraviolet rays includes: a substrate 11; a light emitting layer 33 with a multiquantum well structure provided on the substrate 11; and a metal layer 13 provided on the light emitting layer 33. A band gap of a well layer 31 in the light emitting layer 33 increases in a thickness direction of the light emitting layer 33 from a substrate 11 side toward a metal layer 13 side.