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Systems and methods for electroless plating of thin gold films directly onto silicon nitride and into pores in silicon nitride
Systems and methods for electroless plating of thin gold films directly onto silicon nitride and into pores in silicon nitride
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机译:用于将金薄膜直接化学镀到氮化硅上以及氮化硅的孔中的系统和方法
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摘要
A method is disclosed for electroless plating of thin metal film directly onto a substrate. The method includes the steps of: cleaning the substrate to remove organic material; etching a surface of the substrate to remove an oxygen-containing surface layer; soaking and rinsing the substrate in a plurality of baths following etching; and electroless plating the metal onto the substrate.
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