Method and system for detecting malfunction of a MEMS micropump

摘要

Method for detecting failure including possible under or over delivery of a micropump having at least an inlet valve, a pumping chamber with an inner pressure sensor and an outlet valve, said method comprising the determination of the pump tightness via the measurement of the pressure by said inner pressure sensor in said pumping chamber at least at certain intervals when the pump is inactive and the comparison with a value of reference.