METHOD AND SYSTEM FOR DETECTING MALFUNCTION OF A MEMS MICROPUMP

摘要

Method for detecting failure including possible under or over delivery of a micropump having at least an inlet valve, o a pumping chamber with an inner pressure sensor and an outlet valve, said method comprising the determination of the pump tight - ness via the measurement of the pressure by said inner pressure sensor in said pumping chamber at least at certain intervals when the pump is inactive and the comparison with a value of reference.