Multi-axis piezoresistive force sensor

摘要

A microelectromechanical system (MEMS) sensor device comprising at least one microelectromechanical system sensor to characterize intracellular dynamics and behavior of a living biological cell so as to quantitatively measure the mechanical strength thereof. The microelectromechanical system sensor being responsive to mechanical force changes during said cell's contraction, migration, proliferation and differentiation.