Outgassing impact on process chamber reduction via chamber pump and purge

摘要

A workpiece processing system, has a process chamber coupled to an outgassing chamber. An outgassing chamber valve selectively isolates a processing environment from an outgassing environment defined within the respective process and outgassing chambers. A heater selectively heats the workpiece on a workpiece support in the outgassing chamber to a first predetermined temperature. A vacuum source selectively depressurizes the outgassing chamber to a first predetermined pressure. A workpiece transfer apparatus selectively transfers the workpiece between the outgassing and process chambers. A controller isolates the workpiece in the outgassing chamber by the outgassing chamber valve and is configured to concurrently heat the workpiece to the first predetermined temperature and depressurize the outgassing chamber to the first predetermined pressure by the respective heater and vacuum source. The workpiece is maintained at the first predetermined temperature and the first predetermined pressure for a first period of time associated with a predetermined outgassing threshold.