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EXTREMELY HIGH VACUUM CHAMBER FOR LOW OUTGASSING PROCESSING AT NASA GODDARD

机译:极高的真空腔,用于NASA GODDARD的低出气处理

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The levels of vacuum that proceed past the high vacuum range into the ultra high and then the extremely high vacuum range become more difficult to achieve each decade that a system progresses through. This paper will explore the difficulties and cover some of the design principles used in achieving vacuum levels in the low 10~(-12) torr pressure range. This system was entirely built with commercially-available off the shelf (COTS) components. This chamber was designed in 1998 to provide a very low outgassing environment for the processing and sealing of charge-coupled devices (CCD's) for some of the Hubble Space Telescope replacement optics.
机译:从高真空范围发展到超高真空范围,然后再达到极高真空范围的真空水平变得越来越难以达到系统运行的每十年。本文将探讨困难之处,并介绍在低10〜(-12)托压力范围内实现真空度所使用的一些设计原理。该系统完全由商业可用的现成(COTS)组件构建而成。该室于1998年设计,为某些哈勃太空望远镜替代光学器件的电荷耦合器件(CCD)的处理和密封提供了非常低的除气环境。

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