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System and method of monitoring and controlling temperature of semiconductor substrates in FOUP
System and method of monitoring and controlling temperature of semiconductor substrates in FOUP
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机译:在foup中监测和控制半导体衬底温度的系统和方法
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摘要
A temperature monitor system for semiconductor substrates in a front opening unified pod (FOUP) includes a temperature detector and a programmable controller. The temperature detector is in the FOUP and configured to obtain temperature data of semiconductor substrates. The programmable controller is coupled to the temperature detector and configured to control operation of the temperature detector.
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