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Substrate processing apparatus and method with processing unit selection based on usage rate and usage time
Substrate processing apparatus and method with processing unit selection based on usage rate and usage time
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机译:具有基于使用率和使用时间的处理单位选择的基板处理装置和方法
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摘要
A substrate processing apparatus includes a carrier holding unit which holds a carrier that contains substrates, a plurality of processing units, each of which processes a substrate, a substrate transfer unit which transfers substrates between the carrier and the processing units, and a controller. The controller classifies the plurality of processing units into a plurality of groups and is programmed, when determining a processing unit that is to process a substrate, to select one of the plurality of groups, to select one processing unit belonging to the selected group, and to control the substrate transfer unit to carry a substrate into the selected processing unit.
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