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Structure design generation for fixing metal tip-to-tip across cell boundary

机译:生成用于跨细胞边界固定金属尖端的结构设计

摘要

A method for structure design including a processor performing error processing of an initial design file layout. The processor detects a structure design violation at a design cell boundary for a metal layer above (Ma) a via (Vx) at a tip of the Ma for the initial design file layout for a semiconductor structure based on a library of pattern rules. Upon detection of the structure design violation, the processor retargets the Vx for generating a resulting design file layout of the semiconductor structure. A physical semiconductor structure is generated based on the resulting design file layout of the semiconductor structure.
机译:一种用于结构设计的方法,其包括处理器执行初始设计文件布局的错误处理。处理器基于图案规则库,针对Ma结构顶端的过孔(Vx)上方的金属层(Ma)上方的金属层,针对半导体结构的初始设计文件布局,检测设计单元边界处的结构设计违规情况。在检测到结构设计违规时,处理器将Vx重新定位以生成半导体结构的最终设计文件布局。根据所得的半导体结构设计文件布局,生成物理半导体结构。

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