Curable resin composition, resin mold for imprinting, method for photo imprinting, method for manufacturing semiconductor integrated circuit, and method for manufacturing fine optical element

摘要

A curable resin composition comprising: a fluorinated urethane(meth)acrylate represented by formula (1),; wherein, R¹, R², R³ and R⁴ each independently represents a hydrogen atom or a methyl group, x and y each independently represents 1 or 2, and n represents an integer within the range of 1 to 10; R³ and R⁴ each independently represents the hydrogen atom when x and y are both 1; R³ represents the hydrogen atom and R⁴ represents the methyl group when x is 1 and y is 2; R³ represents the methyl group and R⁴ represents the hydrogen atom when x is 2 and y is 1; and R³ and R⁴ each independently represents the methyl group when x and y are both 2.