Fabrication for Organic-Inorganic Hybrid Resin based Single-mode Polymer Optical Waveguides Using the Imprinting Method for High Density Optical Circuit

摘要

Single-mode polymer optical waveguides applicable to silicon photonics technologies are fabricated using the imprinting method. Organic-inorganic hybrid resins are applied to fabricate the waveguides with low propagation loss at longer wavelengths and with high thermal resistance. The obtained optical waveguides have a graded refractive index distribution, by which the single-mode condition could be satisfied with a larger core size.