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METHOD FOR DETERMINING AND REGULATING A DIAMETER OF A SINGLE CRYSTAL DURING PULLING OF THE SINGLE CRYSTAL
METHOD FOR DETERMINING AND REGULATING A DIAMETER OF A SINGLE CRYSTAL DURING PULLING OF THE SINGLE CRYSTAL
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机译:单晶拉制过程中确定和调节单晶直径的方法
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摘要
The diameter (dK) of a cylindrical section and of an end cone of a single crystal being pulled from a melt in a crucible, is determined by measuring the diameter (dK) of the single crystal at an interface with the melt while taking into account a lowering rate (vS) of a surface of the melt relative to the crucible, a lifting rate (vK) with which the crystal is raised relative to the crucible, and a conservation of mass, wherein a diameter of a cylindrical section of the single crystal, determined by means of observing a bright ring on the surface of the melt, and is used for a correction, a plausibility check or a comparison of the diameter (dK) of the single crystal.
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机译:通过测量直径(d K Sub>确定圆柱截面的直径(d K Sub>)和从坩埚中的熔体中拉出的单晶端锥的直径>)与熔体的界面处的单晶,同时考虑到熔体表面相对于坩埚的降低速率(v S Sub>),提升速率(v K Sub>),使晶体相对于坩埚上升,并且质量守恒,其中单晶圆柱截面的直径是通过观察熔体表面上的亮环而确定的;以及用于校正,合理性检查或单晶直径(d K Sub>)的比较。
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