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X-RAY INSPECTING DEVICE, X-RAY THIN FILM INSPECTING METHOD, AND METHOD FOR MEASURING ROCKING CURVE

机译：X射线检查装置，X射线薄膜检查方法及摇摆曲线的测定方法

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摘要

In an X-ray inspection device according to the present invention, an X-ray irradiation unit 40 includes a first X-ray optical element 42 for focusing characteristic X-rays in a vertical direction, and a second X-ray optical element 43 for focusing the characteristic X-rays in a horizontal direction. The first X-ray optical element 42 is constituted by a crystal material having high crystallinity. The second X-ray optical element includes a multilayer mirror.

机译：在根据本发明的X射线检查装置中，X射线照射单元 40 包括用于将特征X射线聚焦在其中的第一X射线光学元件 42 。垂直方向;第二个X射线光学元件 43 ，用于在水平方向上聚焦特征X射线。第一X射线光学元件 42 由具有高结晶度的晶体材料构成。第二X射线光学元件包括多层镜。 展开▼

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公开/公告号US2019227005A1

专利类型

公开/公告日2019-07-25

原文格式PDF

申请/专利权人 RIGAKU CORPORATION;
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申请/专利号US201716205801

发明设计人 KIYOSHI OGATA;KAZUHIKO OMOTE;SEI YOSHIHARA;YOSHIYASU ITO;HIROSHI MOTONO;HIDEAKI TAKAHASHI;TAKAO KINEFUCHI;AKIFUSA HIGUCHI;SHIRO UMEGAKI;SHIGEMATSU ASANO;RYOTARO YAMAGUCHI;KATSUTAKA HORADA;MAKOTO KAMBE;LICAI JIANG;BORIS VERMAN;
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申请日2017-07-12

分类号G01N23/20016;G01B15/02;G21K1/06;G01N23/207;G01N23/20025;

国家 US

入库时间 2022-08-21 12:09:42

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3. X-RAY INSPECTING DEVICE, X-RAY THIN FILM INSPECTING METHOD, AND METHOD FOR MEASURING ROCKING CURVE [P] . 世界知识产权组织专利： WO2018012527A1 . 2018-01-18

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