X-ray inspection apparatus, X-ray thin film inspection method, and method of measuring a rocking curve

摘要

In an X-ray inspection apparatus according to the present invention, an X-ray irradiation unit 40 includes a first X-ray optical element 42 for focusing characteristic X-rays in a vertical direction, and a second X-ray optical element 43 for focusing the characteristic X-rays in a horizontal direction. The first X-ray optical element 42 is formed of a crystal material of high crystallinity. The second x-ray optical element comprises a multi-layer mirror.